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Updated: Jul 26, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Development of scanning X-ray microscopes for materials science spectromicroscopy at the Advanced Light Source
1Lawrence Berkeley National Laboratory, University of California, Berkeley, California, USA.
Abstract:
The development of two zone-plate microscopes for X-ray spectroscopic analysis of materials is described. This pair of instruments will provide imaging NEXAFS analysis of samples in transmission at atmospheric pressure and imaging XPS and NEXAFS analysis of sample surfaces in a UHV environment.
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