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Surface micromachined electrostatically actuated micro peristaltic pump.

Jun Xie1, Jason Shih, Qiao Lin

  • 1Department of Electrical Engineering, California Institute of Technology, Pasadena, CA 91125, USA. junxie@mems.caltech.edu

Lab on a Chip
|October 9, 2004
PubMed
Summary
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This study presents an electrostatically actuated micro peristaltic pump fabricated using multilayer parylene technology. The novel design isolates fluids from electric fields, achieving flow rates up to 1.7 nL/min for microfluidic applications.

Area of Science:

  • Microfluidics
  • MEMS (Micro-Electro-Mechanical Systems)
  • Biomedical Engineering

Background:

  • Microfluidic devices require precise fluid handling.
  • Existing micro-pumps often face challenges with fluid-electrode contact or complex fabrication.
  • Parylene's biocompatibility and dielectric properties make it suitable for microfluidic applications.

Purpose of the Study:

  • To report an electrostatically actuated micro peristaltic pump.
  • To demonstrate fluid pumping using electrostatic actuation of a parylene membrane.
  • To explore the potential for integrating this pump into micro total analysis systems (microTAS).

Main Methods:

  • Surface micromachining using multilayer parylene technology.
  • Electrostatic actuation (DC and AC voltages) of a parylene membrane.

Related Experiment Videos

  • 3-phase peristaltic sequence for fluid pumping.
  • Lumped-parameter dynamic analysis for pump modeling.

    • Main Results:

    • Achieved a maximum flow rate of 1.7 nL/min.
    • Estimated pumping pressure of 1.6 kPa at 20 Hz phase frequency.
    • Demonstrated fluid isolation from the electric field.
    • Dynamic analysis accurately predicted experimental trends.

    Conclusions:

    • The electrostatically actuated micro peristaltic pump is a viable technology for microfluidic systems.
    • The multilayer parylene fabrication enables fluid isolation from electric fields.
    • The pump's small footprint and compatibility with other parylene-based devices facilitate the development of integrated micro total analysis systems (microTAS).