Behaviors of surfactant atoms on Si(001) surface

Hirofumi Matsuhata1, Kunihiro Sakamoto, Kazushi Miki

  • 1Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan. h.matsuhata@aist.go.jp