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A review of focused ion beam technology and its applications in transmission electron microscopy

Masaaki Sugiyama1, Genichi Sigesato

  • 1Advanced Technology Research Laboratories, Nippon Steel Corporation, Futtsu-city, Chiba 293-8511, Japan. msugiyam@re.nsc.co.jp

Journal of Electron Microscopy
|December 8, 2004
PubMed

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