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Glow discharge mass spectrometry.

Volker Hoffmann1, Martin Kasik, Peter K Robinson

  • 1Leibniz Institute for Solid State and Materials Research Dresden, 270116, 01171 Dresden, Germany. v.hoffmann@ifw-dresden.de

Analytical and Bioanalytical Chemistry
|December 30, 2004
PubMed
Summary

Glow discharge mass spectrometry (GDMS) is the industry standard for trace element analysis in metals and semiconductors. This review covers its history, current applications like depth-resolved and non-conductor analysis, and future directions.

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Area of Science:

  • Analytical Chemistry
  • Materials Science
  • Spectrometry

Background:

  • Glow discharge mass spectrometry (GDMS) has become the standard for trace element analysis.
  • Its application spans metals and semiconductors, crucial industries for advanced materials.

Purpose of the Study:

  • To review the history and evolution of GDMS.
  • To present the current state and future prospects of GDMS technology.
  • To summarize key applications and analytical capabilities.

Main Methods:

  • Review of historical development and industry adoption of GDMS.
  • Analysis of GDMS applications, including depth-resolved and non-conductor analysis.
  • Discussion of factors influencing GDMS performance, such as analyte physical properties.

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Main Results:

  • GDMS is the established industry standard for trace element analysis.
  • GDMS offers unique capabilities like depth profiling and analysis of insulators.
  • Quantitative results from GDMS are well-documented and reliable.

Conclusions:

  • GDMS continues to be a vital technique for materials characterization.
  • Ongoing research in areas like "fast flow" sources and pulsed discharges promises further advancements.
  • The technique's versatility and accuracy ensure its continued relevance in scientific and industrial applications.