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Published on: July 18, 2015
Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated
M P Kowalski1, R G Cruddace, K F Heidemann
1Naval Research Laboratory, Code 7655, 4555 Overlook Avenue, SW, Washington, DC 20375, USA. michael.kowalski@nrl.navy.mil
Abstract:
We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C/Si multilayer coating matched to the grating blaze angle of 2.78 degrees. At an angle of incidence of 5.6 degrees and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
