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Single Plane Illumination Module and Micro-capillary Approach for a Wide-field Microscope

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Published on: August 15, 2014

Design of a normal incidence multilayer imaging x-ray microscope.

D L Shealy¹, D R Gabardi, R B Hoover

¹Department of Physics, University of Alabama at Birmingham, Birmingham, Alabama 35294.

Journal of X-Ray Science and Technology

|February 11, 2011

Summary

Doubly reflecting multilayer x-ray optics are feasible, enabling high-resolution solar imaging. This technology paves the way for advanced aplanatic imaging soft x-ray microscopes for diverse scientific applications.

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Area of Science:

X-ray optics and instrumentation
Solar physics
Microscopy

Background:

Normal incidence multilayer Cassegrain x-ray telescopes were successfully deployed.
These instruments provided high spatial resolution solar images.
Feasibility of doubly reflecting multilayer x-ray optical systems was demonstrated.

Purpose of the Study:

To design a doubly reflecting normal incidence multilayer imaging x-ray microscope.
To achieve aplanatic imaging using multilayer optics technology.
To explore applications in advanced scientific research.

Main Methods:

Design based on the Schwarzschild configuration using two spherical mirrors.
Optimization of mirror curvature to minimize spherical aberration and coma.
Optical system ray trace analysis to predict performance.

Main Results:

Ray trace analysis indicates diffraction-limited performance.
Predicted spatial resolution of 600 Å over a 1 mm field of view at 100 Å wavelength.
Microscope designs are currently in fabrication.

Conclusions:

Aplanatic imaging soft x-ray microscopes are achievable with multilayer optics.
These microscopes offer significant potential for x-ray astronomy, lithography, and research.
Further applications include biological, biomedical, metallurgical, and laser fusion research.