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Atomically Traceable Nanostructure Fabrication
Published on: July 17, 2015
Strategies for fabricating atom probe specimens with a dual beam FIB
M K Miller1, K F Russell, G B Thompson
1Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, MS 6136, Oak Ridge, TN 37831-6136, USA. millermk@ornl.gov
Ultramicroscopy
|February 8, 2005
Summary
A new focused ion beam (FIB) method enables precise atom probe specimen preparation at specific locations. This technique is versatile, applicable to various materials and regions of interest for advanced analysis.
Area of Science:
- Materials Science
- Analytical Chemistry
- Nanotechnology
Background:
- Atom probe tomography (APT) requires precisely prepared specimens.
- Site-specific analysis is crucial for understanding material properties at interfaces and defects.
Purpose of the Study:
- To develop a focused ion beam (FIB) lift-out method for site-specific atom probe specimen preparation.
- To demonstrate the applicability of this method across diverse material forms and locations.
Main Methods:
- Utilized focused ion beam (FIB) milling and lift-out techniques.
- Adapted specimen preparation for various material types including precipitates, grain boundaries, and interfaces.
- Developed methods for preparing specimens from thin ribbons, sheet stock, and powders.
Main Results:
- Successfully prepared site-specific atom probe specimens using FIB lift-out.
- Demonstrated capability to target diverse microstructural features and regions.
- Validated the method for different material morphologies.
Conclusions:
- The developed FIB-based lift-out method offers a versatile approach for site-specific atom probe specimen preparation.
- This technique enhances the ability to perform detailed nanoscale analysis at critical material locations.
- The method is adaptable for various material forms, expanding its utility in materials research.
