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[The experiment study on the resolution of electro-optical imaging system at EUV wave band]

Ling-ling Xue1, Bo Chen, Yu-min Li

  • 1State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130022, China.

Guang Pu Xue Yu Guang Pu Fen Xi = Guang Pu
|March 17, 2005
PubMed

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