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Updated: Aug 8, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Experimental demonstration of waveguide-coupled round-cornered octagonal microresonators in silicon nitride
1Department of Electrical and Electronic Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong Special Administrative Region, China.
Abstract:
We report laterally waveguide-coupled octagonal microresonators with designed round resonator corners in silicon nitride. We demonstrate nearly single-mode add-drop filter characteristics, when 50-microm-size round-cornered octagonal microresonators are used, with an optimum coupling efficiency exceeding 96%, a finesse of approximately 30, and a Q of approximately 6400. Our experiments also reveal two unforeseen phenomena in certain microresonator shapes: a pronounced drop in coupling efficiency and resonance notches in the drop spectrum. These device characteristics hint at the recently postulated multiple orbit interference in waveguide-coupled polygonal microresonators.

