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Diffraction-induced coherence levels.

Alexander Tavrov1, Joanna Schmit, Norbert Kerwien

  • 1Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi, Tokyo 184-8588 Japan.

Applied Optics
|April 20, 2005
PubMed
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Complex diffraction effects create unexpected low-coherence fringes near trench edges, deviating from surface topology. These findings, observed in micrometer-wide trenches, were validated through rigorous numerical simulations and white-light interference microscopy.

Area of Science:

  • Optics and Photonics
  • Microscopy
  • Nanotechnology

Background:

  • High-aspect ratio structures, such as trenches, are critical in microelectronics and photonics.
  • Low-coherence interferometry is a key technique for metrology of micro- and nanostructures.
  • Understanding diffraction effects is crucial for accurate surface profiling.

Purpose of the Study:

  • To investigate complex diffraction effects on low-coherence fringes in high-aspect ratio trenches.
  • To analyze the coherence function and identify anomalous fringe formation near trench edges.
  • To compare experimental observations with rigorous numerical simulations of vector diffraction.

Main Methods:

  • Utilized white-light interference microscopy to register coherence functions of micrometer-wide trenches.

Related Experiment Videos

  • Performed rigorous numerical evaluations of vector diffractions to study additional coherence fringes.
  • Compared simulated interference fields with experimental results.

    • Main Results:

    • Observed additional low-coherence fringes near sharp trench edges, not directly corresponding to surface topology.
    • Demonstrated that complex diffraction effects significantly influence fringe formation in high-aspect ratio structures.
    • Validated the presence of these anomalous fringes through comparison of simulation and experimental data.

    Conclusions:

    • Complex diffraction phenomena can lead to artifacts in low-coherence interferometry of trenches.
    • Accurate metrology of high-aspect ratio structures requires considering vector diffraction effects.
    • Further research into diffraction-induced fringe anomalies is needed for advanced optical metrology.