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Related Experiment Videos

Crystallographic analysis of thin specimens.

V G M Sivel1, F D Tichelaar, H Mohdadi

  • 1Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, The Netherlands. V.G.M.sivel@tnw.tudelft.nl

Journal of Microscopy
|April 29, 2005
PubMed
Summary

Electron backscattering diffraction (EBSD) on thin specimens, prepared using a focused ion beam, offers improved crystallographic analysis. This method enhances pattern quality and spatial resolution for materials like copper-gold alloys.

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Area of Science:

  • Materials Science
  • Crystallography
  • Electron Microscopy

Background:

  • Electron backscattering diffraction (EBSD) is a standard technique for bulk sample crystallographic characterization.
  • Focused ion beam (FIB) milling is used for preparing transmission electron microscopy (TEM) specimens.
  • Copper-gold (Cu3Au) alloy is a relevant material for studying crystallographic properties.

Purpose of the Study:

  • To investigate the application of EBSD on TEM-type thin specimens.
  • To evaluate the quality and resolution of EBSD analysis on FIB-prepared samples.
  • To compare EBSD performance on thin specimens versus bulk samples.

Main Methods:

  • Preparation of thin specimens using focused ion beam (FIB) milling.
  • Acquisition of orientation maps using electron backscattering diffraction (EBSD).

Related Experiment Videos

  • Analysis of EBSD pattern quality and spatial resolution on Cu3Au alloy specimens.

    • Main Results:

    • Successful collection of orientation maps on FIB-prepared thin Cu3Au specimens.
    • Achieved improved EBSD pattern quality compared to bulk samples.
    • Obtained high spatial resolution, well below 10 nm.
    • Observed enhanced signal-to-noise ratio with decreasing sample thickness.

    Conclusions:

    • EBSD is effectively applicable to TEM-type thin specimens prepared by FIB.
    • Thin specimen EBSD provides superior crystallographic information and resolution.
    • Sample thickness is a critical factor for optimizing EBSD signal-to-noise ratio.