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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
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Integration of scanning probes and ion beams

A Persaud1, S J Park, J A Liddle

  • 1E. O. Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA. apersaud@lbl.gov

Nano Letters
|June 10, 2005
PubMed

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