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Area of Science:

  • Physics
  • Engineering

Background:

  • Radio frequency (RF) linear accelerators are crucial for various applications.
  • Scaling ion beam current and energy is a key challenge in accelerator development.

Purpose of the Study:

  • To report the development of multi-beam RF linear ion accelerators constructed from stacked wafers.
  • To describe the progress in scaling beam power using a 112-beam array.

Main Methods:

  • Development of multi-beam RF linear ion accelerators using stacked low-cost wafer technology.
  • Extraction of argon ion current using a 112-beamlet extraction column.
  • Measurement of energy gain in RF gaps.

Main Results:

  • Achieved a total argon ion current of 0.5 mA from the 112-beamlet extraction column.
  • Measured a maximum energy gain of 7.25 keV per RF gap.
  • Demonstrated the feasibility of scaling beam power.

Conclusions:

  • The developed wafer-based multi-beam RF linear ion accelerator technology is promising.
  • A clear path exists to achieve ion currents exceeding 1 mA and energies over 100 keV.
  • This technology has significant potential for material processing applications.