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Inreflectance: a new function for the optimization of multilayers with absorbing materials

Juan I Larruquert1

  • 1Instituto de Física Aplicada, Consejo Superieur de Investigaciones Científicas, C/Serrano 144, 28006-Madrid, Spain. larruquert@ifa.cetef.csic.es

Summary

A new optical property, inreflectance, is introduced to optimize multilayer reflectance. Maximizing inreflectance at each layer enhances overall reflectance, especially in the extreme ultraviolet spectrum.

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