Electron-microscopic imaging of single-walled carbon nanotubes grown on silicon and silicon oxide substrates

Direct imaging of single-walled carbon nanotubes (SWNTs) suspended on pillar-patterned Si or SiO2 substrates is investigated using transmission electron microscopy (TEM) and scanning electron microscopy (SEM). The suspended nanotubes are successfully observed by direct TEM imaging and it is seen that they have either individual or bundles of SWNTs. Low energy (< or =2 keV) SEM produces high contrast images of suspended SWNTs. On the contrary, when SWNTs contact a SiO2 substrate, they are imaged using electron-beam induced current. The image brightness depends on the length of SWNTs.