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Angular-interrogation attenuated total reflection metrology system for plasmonic sensors.

Jenq-Nan Yih1, Fan-Ching Chien, Chun-Yun Lin

  • 1Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan.

Applied Optics
|October 22, 2005
PubMed
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We created an angular-interrogation attenuated total reflection (ATR) system for plasmonic sensors. This system achieves high angular accuracy for surface plasmon resonance (SPR) devices, enhancing sensor metrology.

Area of Science:

  • Plasmonics
  • Optical Metrology
  • Sensor Technology

Background:

  • Surface Plasmon Resonance (SPR) sensors are crucial for label-free biomolecular detection.
  • Existing metrology systems for SPR sensors face limitations in accuracy and simultaneous mode measurement.
  • Advanced metrology is needed to fully characterize diverse SPR sensor architectures.

Purpose of the Study:

  • To develop a novel angular-interrogation attenuated total reflection (ATR) metrology system.
  • To evaluate the system's performance across three distinct plasmonic sensor types.
  • To achieve high-precision angular measurements for plasmonic sensors.

Main Methods:

  • Designed an angular-interrogation ATR system.
  • Integrated capabilities for simultaneous transverse magnetic (TM) and transverse electric (TE) mode reflectivity spectra measurement.

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  • Optimized fabrication processes and employed sophisticated instrumentation for system calibration.

    • Main Results:

    • The developed ATR system successfully measured reflectivity spectra for conventional SPR, coupled-waveguide SPR, and nanoparticle-enhanced SPR devices.
    • Simultaneous measurement of TM and TE modes was achieved.
    • The system demonstrated an impressive resonant angle measurement accuracy of 10⁻⁴ degrees.

    Conclusions:

    • The proposed ATR metrology system offers high angular accuracy for various plasmonic sensors.
    • This advancement enables more precise characterization and development of SPR-based sensing platforms.
    • The system's capabilities support the optimization of plasmonic sensor fabrication and performance.