Development of a resin curing model for UV nanoimprint

Area of Science:

• Materials Science
• Nanotechnology
• Polymer Chemistry

Background:

• UV nanoimprint lithography offers advantages over thermal methods, operating at room temperature and low pressure.
• Understanding resin solidification is crucial for optimizing UV nanoimprint processes.
• Low-viscosity UV-curable resins were developed for enhanced processability.

Purpose of the Study:

• To develop a real-time measurement system for assessing resin cure degree in UV nanoimprint.
• To establish a predictive curing model for UV nanoimprint processes.
• To investigate the relationship between process parameters and resin solidification.

Main Methods:

• A measurement system was designed using Fourier transform infrared spectroscopy, a UV light source, and an optical guide.
• New low-viscosity UV-curable resins were synthesized and tested.
• A curing model was developed based on experimental data, considering UV irradiation time, power, and temperature.

Main Results:

• The measurement system successfully monitored the degree of cure in real-time.
• Imprint tests using the developed resins were performed successfully.
• The curing model demonstrated an exponential relationship between the degree of cure and key UV parameters.

Conclusions:

• The developed measurement system and curing model enhance the understanding of resin solidification in UV nanoimprint.
• The established exponential model accurately predicts resin cure for various UV-curable resins.
• This work facilitates process optimization and the development of novel UV-curable materials.