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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

An experimental model of beam broadening in the variable pressure scanning electron microscope

Xiaohu Tang1, David C Joy

  • 1Electron Microscope Facility, University of Tennessee, Knoxville 37996-0840, USA.

Scanning
|December 24, 2005
PubMed

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