Inductive heating and E to H transitions in capacitive discharges

P Chabert1, J-L Raimbault, P Levif

  • 1LPTP, Ecole Polytechnique, 91128 Palaiseau, France. chabert@lptp.polytechnique.fr

Physical Review Letters
|December 31, 2005
PubMed
Summary

This study presents an electromagnetic model for capacitive discharges, revealing that plasma can be sustained by electric (E) or magnetic (H) fields. The discharge transitions between E and H field dominance as voltage increases.

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