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Scanning-probe Single-electron Capacitance Spectroscopy

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Published on: July 30, 2013

Inductive heating and E to H transitions in capacitive discharges.

P Chabert¹, J-L Raimbault, P Levif

¹LPTP, Ecole Polytechnique, 91128 Palaiseau, France. chabert@lptp.polytechnique.fr

Physical Review Letters

|December 31, 2005

Summary

This study presents an electromagnetic model for capacitive discharges, revealing that plasma can be sustained by electric (E) or magnetic (H) fields. The discharge transitions between E and H field dominance as voltage increases.

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Area of Science:

Plasma Physics
Electromagnetism
Electrical Discharges

Background:

Classical capacitive discharge models rely on electrostatic approximations.
Electromagnetic effects become crucial when excitation wavelength and plasma skin depth are finite.

Purpose of the Study:

To develop and solve an electromagnetic model for capacitive discharges applicable across a wide range of parameters.
To investigate the influence of electromagnetic fields on plasma sustainment.

Main Methods:

Solving an electromagnetic model for capacitive discharges.
Analyzing the behavior of electric (E) and magnetic (H) fields within the plasma.

Main Results:

The plasma can be sustained by either the capacitive (E) field or the inductive (H) field.
A transition from E-field to H-field dominance occurs as the inter-electrode voltage is increased.

Conclusions:

The developed electromagnetic model provides a comprehensive description of capacitive discharges.
Understanding E to H field transitions is key to controlling and optimizing plasma behavior in various applications.