Radioactive sputter cathodes for 32P plasma-based ion implantation

M A Fortin1, R W Paynter, A Sarkissian

  • 1INRS-EMT (Université du Québec), 1650 boul. Lionel Boulet, Varennes, Québec, Canada J3X 1S2. fortin@bms.uu.se