Ville Kaajakari1, Jukka K Koskinen, Tomi Mattila
1VTT Technical Research Centre of Finland, VTT Information Technology, Espoo, Finland. ville.kaajakari@vtt.fi
Capacitively coupled microresonators are more susceptible to 1/f-noise aliasing due to capacitive transduction. This study presents analytical and simulation methods to model phase noise in micro-mechanical oscillators.
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