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Updated: Aug 11, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Phase noise in capacitively coupled micromechanical oscillators
Ville Kaajakari1, Jukka K Koskinen, Tomi Mattila
1VTT Technical Research Centre of Finland, VTT Information Technology, Espoo, Finland. ville.kaajakari@vtt.fi
Abstract:
Phase noise in capacitively coupled microresonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.
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