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Surface acoustic wave velocity in single-crystal AlN substrates
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 14, 2006
Abstract:
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S11-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C44 to be 122 +/- 1 GPa.
