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Updated: Jun 6, 2025

Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
Quantum Channel Extreme Bandgap AlGaN HEMT
Michael Shur1, Grigory Simin2, Kamal Hussain3
1Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180, USA.
This study introduces an advanced AlGaN quantum channel high-electron-mobility transistor (HEMT) that achieves a record breakdown voltage. The quantum channel design enhances electron confinement, leading to superior power device performance.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Semiconductor Device Physics
Background:
- Conventional high-electron-mobility transistors (HEMTs) face limitations in breakdown voltage.
- The design of the quantum channel in HEMTs is crucial for device performance.
- AlGaN-based materials offer potential for high-power applications due to their wide bandgap properties.
Purpose of the Study:
- To investigate the impact of a quantum channel design on the breakdown field of AlGaN HEMTs.
- To understand the role of electron quantization and polarization fields in enhancing device performance.
- To demonstrate the potential of quantum channel HEMTs for superior power device applications.
Main Methods:
- Metalorganic Chemical Vapor Deposition (MOCVD) growth of an AlGaN quantum channel HEMT on an AlN substrate.
- Characterization of the critical breakdown field and analysis of electron gas quantization effects.
- Investigation of quantum-enabled real space transfer mechanisms in high electric fields.
Main Results:
- Achieved a critical breakdown field of 11.37 MV/cm, exceeding the expected value for the AlGaN channel material.
- Demonstrated that electron quantization in the 2D electron gas contributes significantly to the increased breakdown field.
- Observed quantum-enabled real space transfer of electrons into barrier layers, further enhancing breakdown voltage.
Conclusions:
- The quantum channel design in AlGaN HEMTs enables enhanced electron confinement and polarization effects, leading to record-high breakdown voltages.
- This approach overcomes limitations of conventional HEMT designs, particularly at low sheet electron densities.
- Quantum channel HEMTs represent a promising pathway for developing next-generation superior power electronic devices.
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