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Updated: Aug 5, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

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Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron

O C Wells1, L M Gignac, C E Murray

  • 1IBM Research Division, Yorktown Heights, New York, USA.

Scanning
|March 1, 2006
PubMed

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