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Updated: Aug 10, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
Published on: August 12, 2013
Experimental characterization of focusing by high-numerical-aperture zone plates
Rajesh Menon1, Dario Gil, Henry I Smith
1Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge 02139, USA. rmenon@nano.mit.edu
Abstract:
High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations.

