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Stress-mapping sensors for high-power adaptive micro-optics.
Mohd Suffian B Zamali1, Joseph J Talghader
1Department of Electrical and Computer Engineering, University of Minnesota, 200 Union Street SE, Minneapolis, Minnesota 55455, USA. suffian@ece.umn.edu
Applied Optics
|March 17, 2006
Summary
Continuous deformable membrane mirrors can develop thermal stress when correcting high-power wavefronts. This study presents a novel technique to measure this stress in nondeforming membrane structures, crucial for adaptive optics applications.
Area of Science:
- Optics and Photonics
- Materials Science
- MEMS Technology
Background:
- Continuous deformable membrane mirrors offer advantages in adaptive optics due to their diffraction-free and smooth phase variation properties.
- High-power wavefront correction can lead to increased membrane temperature and in-plane thermal stress because of coating absorption and clamped boundaries.
Purpose of the Study:
- To present a novel technique for measuring thermal stress in nondeforming continuous membrane mirror structures.
- To simultaneously measure and decouple directional stress and temperature effects in micromachined membrane mirrors.
Main Methods:
- Utilized a group of three ion-implanted silicon resistors with different orientations for simultaneous measurement.
- Employed micromachined membrane mirrors with integrated sensors to monitor stress and temperature.
- Applied incident power to induce thermal stress and recorded sensor responses.
Main Results:
- Successfully measured changes in compressive thermal stress within 80-90 kPa.
- Demonstrated the ability to decouple directional stress and temperature effects.
- Validated the technique for characterizing thermal stress in membrane mirror systems.
Conclusions:
- The presented technique enables accurate measurement of thermal stress in continuous deformable membrane mirrors.
- This method is vital for understanding and mitigating thermal stress effects in high-power adaptive optics systems.
- The findings contribute to the development of more robust and reliable membrane mirror technologies.