Acoustic microsensors--the challenge behind microgravimetry

Ralf Lucklum1, Peter Hauptmann

  • 1Institute for Micro and Sensor Systems (IMOS), Otto-von-Guericke-University, Magdeburg, Germany. Ralf.Lucklum@et.uni-magdeburg.de

Summary

Acoustic microsensors offer high-resolution detection but are limited by non-gravimetric effects in liquid applications. This review explores resonant sensor developments and interface activities, discussing viscoelastic and interfacial influences on sensor signals.