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Updated: Aug 9, 2026
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Immersion digital in-line holographic microscopy
J Garcia-Sucerquia1, Wenbo Xu, M H Jericho
1Department of Physics and Atmospheric Science, Dalhousie Univeristy, Halifax, Nova Scotia, Canada. jigarcia@Fizz.Phys.Dal.Ca
Abstract:
Digital in-line holographic microscopy is a promising new tool for high resolution imaging. We demonstrate, by using latex beads, that a considerable increase in numerical aperture, and, therefore, resolution can be achieved if the space between a source and a CCD camera chip is filled with a high refractive index medium. The high refractive index medium implies a shorter effective wavelength so that submicrometer resolution can be obtained with laser light in the visible range.
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