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Surface segregation and backscattering in doped silicon nanowires.

M V Fernández-Serra1, Ch Adessi, X Blase

  • 1Laboratoire de Physique de la Matière Condensée et Nanostructures (LPMCN), UMR CNRS 5586, Université Claude Bernard Lyon 1, Bâtiment Brillouin, 43 Bd 11 Novembre 1918, 69622 Villeurbanne, France.

Summary

Doping silicon nanowires with boron or phosphorus causes impurities to segregate at the surface, reducing conductivity. Passivation further neutralizes dopants at surface defects, impacting carrier density and differing between p- and n-type doping.

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