A new open-loop driving method of piezoelectric actuator for periodic reference inputs

The hysteresis characteristic of piezoelectric actuators is one of the major deficiencies in a wide variety of precise tracking positioning controls. In this paper, a novel mathematical model is proposed to describe hysteresis precisely and an open-loop tracking controller is implemented with the proposed model to compensate the hysteresis for tracking periodic sinusoidal inputs. Finally, some tracking control experiments based on a micro-positioning stage for the desired sinusoidal trajectory are performed according to the proposed method and the experimental results demonstrate that the positioning precision is noticeably improved in the open-loop operation compared to the conventional open-loop control without any compensation. In comparison to the regular PID closed-loop controller, the proposed feedforward control method has better tracking performance.