Related Experiment Video
Updated: Aug 7, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Characteristic analysis of nanosilicon rectangular waveguides for planar light-wave circuits of high integration
Daoxin Dai1, Yaocheng Shi, Sailing He
1Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, Zhejiang University, Joint Research Center of Photonics of the Royal Institute of Technology, Sweden. dxdai@coer.zju.edu.cn
Abstract:
When a full-vectorial finite-difference method is used, rectangular Si waveguides can be characterized for planar light-wave circuits of high integration. The single-mode condition for a rectangular Si waveguide is obtained first. The birefringence, which can be adjusted by modifying the thickness of the cladding layer, is also studied. For a nano-Si rectangular waveguide the pure bending loss is very small even for an ultrasmall bending radius (e.g., a few micrometers), and the transition loss becomes dominant. The width and height are optimized to minimize the bending radius for the requirement that the bending loss is smaller than 0.1 dB. Finally the coupling between two parallel straight waveguides is analyzed, and it is shown that there is an optimal width for the maximal coupling length.

