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Related Experiment Videos

A disk-pivot structure micro piezoelectric actuator using vibration mode B11.

Xiangcheng Chu1, Long Ma, Longtu Li

  • 1The State Key Laboratory of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China. chuxiangcheng@tsinghua.edu.cn <chuxiangcheng@tsinghua.edu.cn>

Ultrasonics
|July 1, 2006
PubMed
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A novel micro piezoelectric actuator utilizes a B(11) vibration mode with a disc design for efficient wobble motion. This compact actuator achieves high rotation speeds, offering potential for micro-robotics and precise instrumentation.

Area of Science:

  • Materials Science and Engineering
  • Mechanical Engineering
  • Electrical Engineering

Background:

  • Conventional wobble-type ultrasonic motors often employ piezoelectric rods or cylinders.
  • There is a need for miniaturized actuators with low drive voltage and precise control.

Purpose of the Study:

  • To design and analyze a micro piezoelectric actuator using the B(11) vibration mode.
  • To investigate the performance of a piezoelectric disc-based actuator for micro-rotation applications.

Main Methods:

  • Design of a micro piezoelectric actuator (14mm outer diameter) using a piezoelectric disc to excite wobble modes.
  • Utilized a metal cylinder stator to amplify transverse displacement, driving a metal rod rotor.
  • Performed Finite Element Analysis (FEA) on the stator to determine resonant frequency.

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Main Results:

  • FEA predicted a resonant frequency of 49.03kHz for the B(11) mode; experimental measurement yielded 45.7kHz.
  • Achieved a maximum rotation speed of 10,071rpm under an alternating current of 100V.
  • Demonstrated features including low drive voltage, micromation, and controllable wobble states.

Conclusions:

  • The designed micro piezoelectric actuator effectively utilizes the B(11) vibration mode for rotational motion.
  • The actuator's design offers advantages in miniaturization, low voltage operation, and control flexibility.
  • Potential applications include precise instruments, bioengineering, and other micro-actuator systems.