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On-Chip Crystallization and Large-Scale Serial Diffraction at Room Temperature
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Crystallinity estimation of thin silicon-on-insulator layers by means of diffractometry using a highly parallel X-ray

Shingo Takeda1, Kazushi Yokoyama, Yoshiyuki Tsusaka

  • 1Japan Synchrotron Radiation Research Institute, Sayo, Hyogo 679-5198, Japan. stakeda@spring8.or.jp

Journal of Synchrotron Radiation
|August 23, 2006
PubMed

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