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Fabrication and characterization of nanopore array.

Yongqi Fu1, Ngoi Kok Ann Bryan, Loh Thian Fatt

  • 1Precision Engineering and Nanotechnology Center, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore.

Journal of Nanoscience and Nanotechnology
|October 10, 2006
PubMed
Summary

Researchers fabricated a 30 nm nanopore array using focused ion beam (FIB) milling and sacrificial layer etching. This method enables precise fabrication of nanoscale structures for advanced applications.

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Surface Science

Background:

  • Nanopore arrays are crucial for applications in filtration, sensing, and data storage.
  • Fabrication of precise, high-density nanopore arrays remains a significant challenge.

Purpose of the Study:

  • To develop a reliable method for fabricating nanopore arrays with controlled dimensions.
  • To investigate the use of focused ion beam (FIB) milling in conjunction with a sacrificial layer for nanopore fabrication.

Main Methods:

  • Fabrication involved coating Si(100) with SiO2 (sacrificial layer) and Aluminum (milling layer) via physical evaporation deposition (PVD).
  • A window was opened using reactive ion etching, followed by precise FIB milling with bitmap function to define pore patterns.
  • Secondary electron detection during FIB milling monitored the process, stopping upon reaching the SiO2 layer. The sacrificial SiO2 layer was subsequently removed via wet chemical etching.

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Main Results:

  • A nanopore array with an approximate diameter of 30 nm was successfully fabricated.
  • Transmission electron microscopy (TEM) confirmed the successful formation and characteristics of the nanopore arrays.

Conclusions:

  • Focused ion beam (FIB) milling combined with a sacrificial layer provides an effective route for fabricating nanoscale nanopore arrays.
  • The developed technique offers precise control over nanopore dimensions and arrangement, suitable for advanced nanotechnology applications.