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Design and Fabrication of Continuous Surface Optical Field Modulator for Angular Spectrum Discreteness Compensation.

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Researchers developed random micro-cylindrical lens arrays to improve light uniformity in lithography machines by compensating for angular spectrum discreteness, achieving precise angular spectrum modulation and a Gaussian illumination field.

Keywords:
angular spectrum discretenesscontinuous surface profileoptical field modulationrandom micro-cylindrical lens array

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Area of Science:

  • Optics and Photonics
  • Semiconductor Manufacturing Technology
  • Micro-optics

Background:

  • The light homogenizing element is critical for uniform energy distribution in lithography illumination systems.
  • Angular spectrum discreteness in homogenizers significantly degrades light uniformity.

Purpose of the Study:

  • To design and fabricate a novel angular spectrum modulator to overcome angular spectrum discreteness.
  • To achieve a uniform Gaussian optical field for enhanced lithography performance.

Main Methods:

  • Fabrication of random micro-cylindrical lens arrays with adjustable pitches and curvature radii.
  • Utilizing mask-moving technology for modulator fabrication.
  • Characterization of surface profile and optical performance through experiments.

Main Results:

  • Successfully generated a small-angle Gaussian optical field, compensating for angular spectrum discreteness.
  • Achieved precise angular spectrum modulation by adjusting lens parameters.
  • Optical tests demonstrated an angle error below 0.02° and a balance better than 0.5%.

Conclusions:

  • The developed random micro-cylindrical lens array effectively addresses angular spectrum discreteness in lithography illumination.
  • The fabricated angular spectrum modulator provides a viable solution for achieving high light uniformity.
  • This technology enables precise control over the angular spectrum, crucial for advanced lithography applications.