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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Nanoscale scanning transmission electron tomography

P A Midgley1, M Weyland, T J V Yates

  • 1Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK. pam33@cam.ac.uk

Journal of Microscopy
|October 25, 2006
PubMed

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