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Chromatic confocal spectral interferometry.

Evangelos Papastathopoulos1, Klaus Körner, Wolfgang Osten

  • 1Institut für Technische Optik, Universität Stuttgart, Germany. papastav@ito.uni-stuttgart.de

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Chromatic confocal spectral interferometry (CCSI) is a new topography measurement technique. It combines spectral interferometry and chromatic confocal microscopy for single-shot, high-NA white-light detection and depth positioning.

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Microscopy

Background:

  • Topography measurements require precise depth sensing.
  • Existing methods like spectral interferometry and chromatic confocal microscopy have limitations in range or resolution.
  • A hybrid approach could overcome these limitations.

Purpose of the Study:

  • To introduce and validate Chromatic Confocal Spectral Interferometry (CCSI) as a novel topography measurement technique.
  • To demonstrate CCSI's capability for single-shot, high numerical aperture (NA) white-light interferometric detection.
  • To show CCSI's ability to retrieve object depth position using interferometric signal phase.

Main Methods:

  • Combining spectral interferometry and chromatic confocal microscopy.
  • Utilizing a confocally filtered and chromatically dispersed focus for detection.
  • Acquiring interferometric signals and analyzing their phase (modulation frequency) for depth retrieval.

Main Results:

  • CCSI enables white-light interferometric detection with high NA in a single shot.
  • The method successfully retrieves the depth position of reflecting or scattering objects.
  • The depth range of the sensor is decoupled from the objective's NA due to the dispersed focus.

Conclusions:

  • CCSI is a pioneering interferometric method for topography measurements.
  • This technique offers a unique combination of high NA detection and depth positioning.
  • CCSI advances metrology by decoupling sensor depth range from objective NA.