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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

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Two-wavelength Talbot effect and its application for three-dimensional step-height measurement.

Dalip Singh Mehta¹, Satish Kumar Dubey, Chandra Shakher

¹Laser Applications and Holography Laboratory, Instrument Design Development centre, Indian Institute of Technology, Dehli, India. dsmehta@iddc.iitd.ernet.in

|October 28, 2006

Summary

Talbot self-image shift, utilizing wavelength changes, accurately measures 3D step height. This non-contact optical method overcomes phase ambiguity for large objects.

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Area of Science:

Optics and Photonics
Metrology and Measurement Science

Background:

Talbot self-imaging is a diffraction phenomenon where a periodic object illuminated by coherent light forms self-images at specific distances.
Wavelength dependency of Talbot self-images can be exploited for metrological applications.

Purpose of the Study:

To describe and experimentally demonstrate the Talbot self-image shift phenomenon.
To implement this phenomenon for non-ambiguous three-dimensional (3D) step height measurement of discontinuous objects.

Main Methods:

Illuminating a periodic grating with two different laser wavelengths (λ1 and λ2).
Recording Talbot self-images along the longitudinal direction for each wavelength.
Utilizing Fourier-transform fringe analysis to determine fringe contrast for step height calculation.

Main Results:

Experimental verification of Talbot self-image shift with changing wavelengths.
Successful measurement of 3D step height of a large discontinuous object without phase ambiguity.
Demonstrated high-visibility bands for accurate measurement.

Conclusions:

Talbot self-image shift provides a robust method for 3D step height measurement.
The proposed system offers advantages like non-mechanical scanning, high stability, compactness, and a wide measurement range compared to interferometric profilers.