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Updated: Jul 19, 2026

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
A high-sensitivity, dual-plate, thickness-shear mode pressure sensor
Abstract:
We propose a dual-plate pressure sensor operating with pressure-induced frequency shifts of thickness-shear modes of a crystal plate resonator. Under an applied normal pressure. The dual-plate structure causes flexure in the crystal plate rather than circumferential compression in usual thickness-shear pressure sensors. This suggests higher sensitivity because a plate responds to a normal pressure more than to a circumferential compression, which is shown by a theoretical analysis using the theory for small fields superposed on initial fields.
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