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Scanning Electron Microscopy

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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

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New system for secondary electron detection in variable-pressure scanning electron microscopy.

¹Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, ul. Janiszewskiego 11/17, 50-372 Wroclaw, Poland. witold.slowko@pwr.wroc.pl

Journal of Microscopy

|November 15, 2006

Summary

A new secondary electron detection system uses a two-stage detector and differential pumping for high-pressure scanning electron microscopy. This design improves gas leakage and detector lifespan across various pressures.

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Area of Science:

Materials Science
Physics
Analytical Chemistry

Background:

High-pressure scanning electron microscopy (HPSEM) requires specialized detectors capable of operating at pressures up to 10 mbar.
Conventional secondary electron detectors often face limitations in gas handling and longevity under such conditions.
Existing systems may struggle with gas leakage and reduced operational lifespan.

Purpose of the Study:

To present a novel secondary electron detection system for HPSEM.
To address challenges of gas leakage and detector lifespan in high-pressure environments.
To leverage the advantages of scintillator detectors at elevated gas pressures.

Main Methods:

Development of a two-stage detector head incorporating a scintillation Everhart-Thornley detector and a microsphere plate.
Integration of a differential pumping system to manage vacuum levels between stages (below 0.1 mbar).
Asymmetric arrangement of the detector system components.

Main Results:

The novel system effectively detects secondary electrons across a wide pressure range (high vacuum to 10 mbar).
The asymmetric design demonstrated reduced gas leakage through the microsphere plate.
The system is expected to offer an extended operational lifespan for the detector plate.

Conclusions:

The presented secondary electron detection system is suitable for HPSEM applications.
The design effectively mitigates gas leakage and enhances detector durability.
This innovation supports advanced microscopy at higher gas pressures.