Related Experiment Video
Updated: Jul 18, 2026

A Multimodal Wide-Field Fourier-Transform Raman Microscope
Published on: December 30, 2025
Deep-ultraviolet Raman microspectroscopy: characterization of wide-gap semiconductors
Shin-ichi Nakashima1, Hazime Okumura, Taketsugu Yamamoto
1National Institute of Advanced Science and Industrial Technology, Central 2, Umezono 1-1-1, Tsukuba, Ibaraki 305-8568 Japan. nakashima-s@aist.go.jp
Abstract:
We have developed a high-throughput deep-ultraviolet (DUV) Raman microspectrometer with excitation from a continuous wave (cw) laser operated at 244 nm that enables us to characterize thin surface layers of wide-gap semiconductors. This spectrometer system consists of a filter spectrometer for the rejection of stray light and a high-dispersion spectrograph combined with a liquid nitrogen cooled charge-coupled device (CCD) detector and extends the low-frequency limit of the observable spectral range down to 170 cm(-1). In the microscope we use a Cassegrain reflective objective for the collection of the scattered light and an off-axis mirror for introduction of the excitation laser light. DUV Raman spectroscopy has been applied for studying wide-gap semiconductors including SiC and AlGaN epitaxial films and shallow implanted layers of these materials. Raman spectra of various crystals have also been measured for examining the performance of this system. Resonance enhancement of Raman bands has been observed for several semiconductors, and the results are discussed.
Related Concept Videos
Raman Spectroscopy Instrumentation: Overview
The monochromatic laser source, typically using visible or near-infrared radiation, generates a highly focused beam of light. This light interacts with the molecules of the sample, scattering some of the light. Liquid and gaseous samples are usually tested in ordinary glass capillaries, while solids can be analyzed as powders packed in capillaries or as potassium...
Raman Spectroscopy: Overview
However, a small fraction of the scattered light exhibits a frequency shift due to the exchange of energy between the incident photons and the...
UV–Vis Spectroscopy: Molecular Electronic Transitions
UV–Vis Spectrometers
Ultraviolet and Visible (UV–Vis) Spectroscopy: Overview
UV–Vis Spectroscopy of Conjugated Systems
One of the factors influencing λmax is the extent of conjugation in the...
