Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Videos

Polarization modulation imaging ellipsometer.

Soichi Otsuki1, Mitsuru Ishikawa

  • 1Health Technology Research Center., National Institute of Advanced Industrial Science and Technology, Kagawa, Japan. otsuki-s@aist.go.jp

Optics Letters
|December 23, 2006
PubMed
Summary

A new ellipsometry method combines polarization modulation with parallel synchronous detection for full-frame measurements. This technique accurately determines thin film thickness, achieving high resolution and low temporal noise.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Modeling striatal development and disease with human pluripotent stem cells.

Inflammation and regeneration·2026
Same author

Enhanced calcium activity and transcriptomic alterations in iPSC-derived neurons from BAFME patients with repeat expansions.

Neuroscience research·2026
Same author

Efficient Induction of Oligodendrocyte Lineage From Pluripotent Stem Cells via Temporal Modulation of OLIG2(S147A) and SOX10.

Genes to cells : devoted to molecular & cellular mechanisms·2026
Same author

Investigation of early axonal phenotypes in an iPSC-derived ALS cellular model using a microfluidic device.

Frontiers in cellular neuroscience·2025
Same author

NEUROD1 efficiently converts peripheral blood cells into neurons with partial reprogramming by pluripotency factors.

Proceedings of the National Academy of Sciences of the United States of America·2025
Same author

Impaired synaptosome phagocytosis in macrophages of individuals with autism spectrum disorder.

Molecular psychiatry·2025

Area of Science:

  • Optics and Photonics
  • Materials Science
  • Surface Science

Background:

  • Ellipsometry is a powerful technique for characterizing thin films.
  • Accurate and high-resolution thickness measurements are crucial in nanotechnology and materials science.
  • Existing ellipsometry methods can be limited in speed and spatial resolution.

Purpose of the Study:

  • To develop a novel full-frame ellipsometry technique for enhanced thin film characterization.
  • To combine polarization modulation with parallel synchronous detection for improved measurement capabilities.
  • To validate the technique by measuring the thickness of a n-octadecylsiloxane monolayer.

Main Methods:

  • Implemented a polarization modulation technique integrated with parallel synchronous detection.

Related Experiment Videos

  • Utilized a switching light source and a CCD camera for full-frame data acquisition.
  • Performed measurements on a monolayer film of n-octadecylsiloxane.

    • Main Results:

    • Achieved full-frame measurement of ellipsometric parameters.
    • The measured thickness of the n-octadecylsiloxane monolayer closely matched theoretical and experimental values.
    • Demonstrated high thickness resolution for imaging (< +/-0.1 nm) and low temporal noise (< +/-0.02 nm) in parallel measurements.

    Conclusions:

    • The combined polarization modulation and parallel synchronous detection technique enables efficient and accurate full-frame ellipsometry.
    • This method offers significant improvements in thickness resolution and measurement speed for thin film analysis.
    • The technique is suitable for precise characterization of monolayer films and other nanoscale structures.