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Variable size and shape distribution of ferroelectric nanoislands by chemical mechanical polishing

Sven Clemens1, Serge Röhrig, Andreas Rüdiger

  • 1Institut für Werkstoffe der Elektrotechnik II, Rheinisch-Westfälische Technische Hochschule, 52056 Aachen, Germany.

Small (Weinheim an Der Bergstrasse, Germany)
|December 29, 2006
PubMed
Abstract

No abstract available in PubMed .

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