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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Ultrathin fullerene films as high-resolution molecular resists for low-voltage electron-beam lithography

Francis P Gibbons1, Alex P G Robinson, Richard E Palmer

  • 1Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Edgbaston, Birmingham B15 2TT, UK. francis@nprl.ph.bham.ac.uk

Small (Weinheim an Der Bergstrasse, Germany)
|December 29, 2006
PubMed
Abstract

No abstract available in PubMed .

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