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Updated: Jul 17, 2026
A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy
Published on: April 8, 2018
Combinatorial approach for ferroelectric material libraries prepared by liquid source misted chemical deposition
Ki Woong Kim1, Min Ku Jeon, Kwang Seok Oh
1Department of Chemical and Biomolecular Engineering and Center for Ultramicrochemical Process Systems, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea.
A new combinatorial liquid source misted chemical deposition (LSMCD) method efficiently screens thin-film materials. This technique optimizes bismuth lanthanum cerium titanate (BLCT) for high remanent polarization, crucial for electronic devices.
Area of Science:
- Materials Science
- Thin Film Technology
- Solid State Chemistry
Background:
- Discovering novel functional materials is key for advancements in thin film electronics and energy-conversion devices.
- Efficient combinatorial methods require reliable, high-density composition thin-film libraries with properties mirroring conventional methods.
Purpose of the Study:
- To develop and validate a combinatorial liquid source misted chemical deposition (LSMCD) method for rapid material screening.
- To optimize the chemical composition of Bi3.75LaxCe0.25-xTi3O12 (BLCT) thin films for enhanced remanent polarization (Pr).
Main Methods:
- Development of a combinatorial liquid source misted chemical deposition (LSMCD) technique.
- Preparation of a Bi3.75LaxCe0.25-xTi3O12 (BLCT) thin-film library with precise compositional control (0.4 mol% La variation).
- Utilized scanning probe microscopy (SPM) for rapid piezoelectric deformation measurements.
Main Results:
- The LSMCD method proved effective for creating homogeneous, multi-component thin-film libraries with ppm-level composition control.
- A maximum remanent polarization (2Pr) of 35 µC/cm² was achieved at x=0.21 in the BLCT system.
- A quantitative relationship was established between the (117) X-ray diffraction (XRD) peak intensity and the Pr value.
Conclusions:
- The developed LSMCD method is a cost-effective and reliable tool for combinatorial material screening.
- The study successfully identified optimal compositions for BLCT thin films with high remanent polarization.
- Scanning piezoelectric deformation measurement using SPM offers a rapid and reliable method for ranking Pr values in nano-sized samples.
