Improved silica-zirconia sol synthesis for fabrication of a single-mode embedded dielectric channel waveguide with...

A novel inorganic-organic hybrid silica-zirconia solgel material, which can generate 10 microm thick film in a single spin-coating process, has been developed and employed in the fabrication of an embedded dielectric channel waveguide on a silica buffer layer of a silicon substrate. The fabricated channel waveguide core had steep ridge walls, good smoothness, and high robustness, and the novel sol synthesis enabled a precise control of the geometrical and optical parameters of the embedded dielectric channel waveguide. In the 1.55 microm telecommunication window, the fundamental modes TE(00) and TM(00) in the embedded channel waveguide had low transmission losses of 0.40 +/- 0.03 dB/cm and 0.59 +/- 0.03 dB/cm, respectively.