Simulation of partially coherent image formation in a compact soft X-ray microscope

Area of Science:

• Optics and Imaging
• Microscopy Techniques
• Computational Physics

Background:

• Compact soft X-ray microscopes generate images with unexpected diffraction-like artifacts.
• Previous imaging did not exhibit these anomalies, necessitating further investigation.

Purpose of the Study:

• To develop a numerical simulation method for two-dimensional images in compact soft X-ray microscopy.
• To investigate the cause of observed diffraction artifacts using partially coherent illumination considerations.

Main Methods:

• Approximation of the condenser zone plate as a secondary incoherent source.
• Modeling the source as individually coherent but mutually incoherent points.
• Image generation by summing contributions from individual source points.

Main Results:

• The numerical model successfully reproduced the diffraction-like artifacts observed in experimental images.
• Qualitative agreement was found between simulated and actual microscope images.
• The results strongly suggest partially coherent illumination as the source of the artifacts.

Conclusions:

• The developed numerical method provides a viable tool for simulating soft X-ray microscope images.
• Partially coherent illumination is identified as the primary cause of the observed artifacts.
• This study enhances understanding of image formation in compact soft X-ray microscopes.