Continuous blood pressure monitoring utilizing a CMOS tactile sensor

A novel tactile device based on a monolithically integrated sensor chip is presented for external blood pressure measurement. It uses a tonometric principle, thus allowing for continuous monitoring of the blood pressure without the need for an invasive catheter. On the chip, the deflection of membranes in an array is sensed capacitively and read out using a SigmaDelta-modulator. The membrane array and the modulator are fabricated on a single chip using an industrial CMOS (complementary metal oxide semiconductor) technology combined with post-process micromachining to achieve small and portable devices with low power consumption. The tested device is operated at a conversion rate of 1 kilosamples per second and is pressure biased to a 2000 hPa (1500 mmHg) reference point. The power consumption of the sensor chip is 11.5 mW with signal-to-noise ratio better than 72 dB. During testing a pressure resolution of approximately 8 hPa (6 mmHg) for one digit at the output of the SigmaDelta-modulator is achieved over the range of interest continuous blood pressure monitoring using this CMOS-based tactile device is successfully demonstrated. The characteristic features of a blood pressure waveform are clearly recognizable from the acquired data.